Custom Modular, Dual-Chamber Circulation Heater Protects Polysilicon Process

Circulation Heater

The Challenge
Polysilicon is frequently used in the manufacture of electronic components and solar panels. During the polysilicon process, a sensitive saline solution releases hydrogen. An intricate mixture of the hydrogen and steam required in the process needed a three-fold solution: The mixture must reach and maintain a high temperature of 1100ºF (593ºC). High pressure must be maintained at 325 psig. Despite the high temperature and high pressure, a low flow rate must also be maintained. If these three requirements are not met, the process will not succeed and the hydrogen will become brittle. In addition, the solution needed to have a modular design so that it could be easily transported and installed overseas

The Solution
To meet these process and design requirements, Chromalox experts worked with ASME to create a custom, dual-chamber inline circulation heater made of high-grade stainless steel and INCOLOY® elements with a low-watt density and a remote-mounted control panel. Chromalox circulation heaters are ideal for industrial gas mixtures and due to the sensitive nature of the polysilicon process, the dual-chamber enabled the mixture to be heated effectively in a two-stage process. Finally, the solution was designed in a modular fashion so the pieces could be shipped separately and then assembled at the manufacturing plant.

The Benefits

  • Delivering innovative modular and custom solutions
  • Long-standing relationships with both the client and the American Society of Mechanical Engineers
  • Consistent temperature accuracy for sensitive polysilicon processes